@article{escidoc:4123523, title = {3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates}, author = {Sanli, U. T. and Jiao, C. and Baluktsian, M. and Grevent, C. and Hahn, K. and Wang, Y. and Srot, V. and Richter, G. and Bykova, I. and Weigand, M. and Schutz, G. and Keskinbora, K.}, journal = {Advanced Science}, volume = {5}, number = {9}, year = {2018}, doi = {10.1002/advs.201800346} }