@inproceedings{6765670, title = {3D nanofabrication on complex seed shapes using glancing angle deposition}, author = {Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, T. and Waizmann, U. and Weis, J. and Fischer, Peer.}, booktitle = {2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)}, pages = {437-440}, address = {Piscataway, NJ, USA}, month = jan, year = {2014}, doi = {10.1109/MEMSYS.2014.6765670}, url = {10.1109/MEMSYS.2014.6765670}, month_numeric = {1} }