@article{escidoc:0009, title = {{High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography}}, author = {Keskinbora, K. and Sanli, U. T. and Baluktsian, M. and Gr\'event, C. and Weigand, M. and Sch\"utz, G.}, journal = {{Beilstein Journal of Nanotechnology}}, volume = {9}, pages = {2049--2056}, publisher = {Beilstein-Institut}, address = {Frankfurt am Main}, year = {2018}, doi = {10.3762/bjnano.9.194} }