@article{escidoc:0184, title = {{Optimizing the fabrication of diffractive optical elements using a focused ion beam system}}, author = {Vijayakumar, A. and Eigenthaler, U. and Keskinbora, K. and Sridharan, G. M. and Pramitha, V. and Hirscher, M. and Spatz, J. P. and Bhattacharya, S.}, journal = {{Proceedings of SPIE}}, volume = {9130}, year = {2014}, doi = {10.1117/12.2051925} }