@phdthesis{escidoc:1574466, title = {Selbst- und Fremddiffusion in amorphem Si28C36N36 und Si3N4}, author = {Matics, S.}, school = {Universit\"at Stuttgart}, address = {Stuttgart}, year = {2000}, doi = {}, url = {http://elib.uni-stuttgart.de/opus/volltexte/2001/963/} }