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Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV

2014

Article

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Author(s): Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Sanli, U. and Grévent, C. and Wolter, C. and Weigand, M. and Szeghalmi, A. and Knez, Mato and Salditt, T. and Schütz, G.
Journal: {Optics Express}
Volume: 22
Number (issue): 15
Pages: 18440--18453
Year: 2014
Publisher: Optical Society of America

Department(s): Modern Magnetic Systems
Bibtex Type: Article (article)

Address: Washington, DC
DOI: 10.1364/OE.22.018440
Language: eng

BibTex

@article{escidoc:0177,
  title = {{Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV}},
  author = {Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Sanli, U. and Gr\'event, C. and Wolter, C. and Weigand, M. and Szeghalmi, A. and Knez, Mato and Salditt, T. and Sch\"utz, G.},
  journal = {{Optics Express}},
  volume = {22},
  number = {15},
  pages = {18440--18453},
  publisher = {Optical Society of America},
  address = {Washington, DC},
  year = {2014},
  doi = {10.1364/OE.22.018440}
}