@incollection{escidoc:0267, title = {{Rutherford Backscattering}}, author = {Carstanjen, H. D.}, booktitle = {{Nanoelectronics and Information Technology. Advanced Electronic Materials and Novel Devices}}, pages = {250--252}, publisher = {WILEY-VCH Verlag}, address = {Weinheim, Germany}, year = {2012}, doi = {} }