In situ x-ray diffraction and spectro-microscopic study of ALD protected copper films
2020
Article
mms
| Author(s): | Dogan, G. and Sanli, U. T. and Hahn, K. and Müller, L. and Gruhn, H. and Silber, C. and Schütz, G. and Grévent, C. and Keskinbora, K. |
| Journal: | ACS Applied Materials and Interfaces |
| Volume: | 12 |
| Number (issue): | 29 |
| Pages: | 33377--33385 |
| Year: | 2020 |
| Publisher: | American Chemical Society |
| Department(s): | Modern Magnetic Systems |
| Bibtex Type: | Article (article) |
| Address: | Washington, DC |
| DOI: | 10.1021/acsami.0c06873 |
| Language: | eng |
|
BibTex @article{escidoc:3257727,
title = {In situ x-ray diffraction and spectro-microscopic study of ALD protected copper films},
author = {Dogan, G. and Sanli, U. T. and Hahn, K. and M{\"u}ller, L. and Gruhn, H. and Silber, C. and Sch{\"u}tz, G. and Gr\'event, C. and Keskinbora, K.},
journal = {ACS Applied Materials and Interfaces},
volume = {12},
number = {29},
pages = {33377--33385},
publisher = {American Chemical Society},
address = {Washington, DC},
year = {2020},
doi = {10.1021/acsami.0c06873}
}
|
|
