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{Optimizing the fabrication of diffractive optical elements using a focused ion beam system}

2014

Article

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Author(s): Vijayakumar, A. and Eigenthaler, U. and Keskinbora, K. and Sridharan, G. M. and Pramitha, V. and Hirscher, M. and Spatz, J. P. and Bhattacharya, S.
Journal: {Proceedings of SPIE}
Volume: 9130
Year: 2014

Department(s): Modern Magnetic Systems
Bibtex Type: Article (article)

DOI: 10.1117/12.2051925
Language: eng

BibTex

@article{escidoc:0184,
  title = {{Optimizing the fabrication of diffractive optical elements using a focused ion beam system}},
  author = {Vijayakumar, A. and Eigenthaler, U. and Keskinbora, K. and Sridharan, G. M. and Pramitha, V. and Hirscher, M. and Spatz, J. P. and Bhattacharya, S.},
  journal = {{Proceedings of SPIE}},
  volume = {9130},
  year = {2014}
}