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Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

2022

Ph.D. Thesis

mms


Author(s): Dogan, G.
Year: 2022

Department(s): Modern Magnetic Systems
Bibtex Type: Ph.D. Thesis (phdthesis)

Address: Stuttgart
School: Universität Stuttgart

DOI: 10.18419/opus-12286
Language: eng
URL: http://elib.uni-stuttgart.de/handle/11682/12303; urn:nbn:de:bsz:93-opus-ds-123032

BibTex

@phdthesis{escidoc:3473323,
  title = {Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection},
  author = {Dogan, G.},
  school = {Universit{\"a}t Stuttgart},
  address = {Stuttgart},
  year = {2022},
  doi = {10.18419/opus-12286},
  url = {http://elib.uni-stuttgart.de/handle/11682/12303; urn:nbn:de:bsz:93-opus-ds-123032}
}